\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\uff0c\u8fd9\u4e00\u9ad8\u79d1\u6280\u88c5\u7f6e\u7684\u5c3a\u5bf8\u901a\u5e38\u5728\u51e0\u6beb\u7c73\u751a\u81f3\u66f4\u5c0f\uff0c\u5176\u5185\u90e8\u7ed3\u6784\u7cbe\u7ec6\u81f3\u5fae\u7c73\u751a\u81f3\u7eb3\u7c73\u91cf\u7ea7\u3002MEMS\u6280\u672f\u662f\u5728\u5fae\u7535\u5b50\u6280\u672f\uff08\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\uff09\u7684\u57fa\u7840\u4e0a\u53d1\u5c55\u8d77\u6765\u7684\uff0c\u5b83\u878d\u5408\u4e86\u5149\u523b\u3001\u8150\u8680\u3001\u8584\u819c\u3001LIGA\u3001\u7845\u5fae\u52a0\u5de5\u3001\u975e\u7845\u5fae\u52a0\u5de5\u548c\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u7b49\u5148\u8fdb\u6280\u672f\uff0c\u5236\u4f5c\u51fa\u9ad8\u79d1\u6280\u7535\u5b50\u673a\u68b0\u5668\u4ef6\u3002<\/p>\n\n\n\n
MEMS\u7cfb\u7edf\u662f\u4e00\u4e2a\u72ec\u7acb\u7684\u667a\u80fd\u7cfb\u7edf\uff0c\u80fd\u591f\u8fdb\u884c\u5927\u6279\u91cf\u751f\u4ea7\u3002\u5176\u5c3a\u5bf8\u901a\u5e38\u5728\u51e0\u6beb\u7c73\u4e43\u81f3\u66f4\u5c0f\uff0c\u5185\u90e8\u7ed3\u6784\u7684\u7cbe\u7ec6\u7a0b\u5ea6\u8fbe\u5230\u5fae\u7c73\u751a\u81f3\u7eb3\u7c73\u91cf\u7ea7\u3002\u4f8b\u5982\uff0c\u5e38\u89c1\u7684MEMS\u4ea7\u54c1\u5c3a\u5bf8\u53ef\u80fd\u4ec5\u4e3a3mm\u00d73mm\u00d71.5mm\uff0c\u751a\u81f3\u66f4\u5c0f\u3002<\/p>\n\n\n\n
\u5728MEMS\u4f20\u611f\u5668\u4e2d\uff0c\u5173\u952e\u7684\u82af\u7247\u5305\u62ecMEMS\u82af\u7247\u548cASIC\u82af\u7247\u3002MEMS\u82af\u7247\u8d1f\u8d23\u611f\u77e5\u5916\u90e8\u4fe1\u53f7\uff0c\u5e76\u5c06\u6d4b\u91cf\u91cf\u8f6c\u6362\u4e3a\u7535\u963b\u3001\u7535\u5bb9\u7b49\u4fe1\u53f7\u53d8\u5316\uff1b\u800cASIC\u82af\u7247\u5219\u8d1f\u8d23\u5c06\u8fd9\u4e9b\u7535\u5bb9\u3001\u7535\u963b\u4fe1\u53f7\u8f6c\u6362\u4e3a\u7535\u4fe1\u53f7\uff0c\u5b9e\u73b0\u4fe1\u53f7\u7684\u8f6c\u6362\u548c\u653e\u5927\u7b49\u529f\u80fd\u3002<\/p>\n\n\n\n
\u4e0e\u4f20\u7edf\u7684\u673a\u68b0\u4f20\u611f\u5668\u76f8\u6bd4\uff0cMEMS\u4f20\u611f\u5668\u5177\u6709\u663e\u8457\u7684\u4f18\u52bf\uff1a\u4f53\u79ef\u5c0f\u3001\u91cd\u91cf\u8f7b\u3001\u6210\u672c\u4f4e\u3001\u529f\u8017\u4f4e\u3001\u53ef\u9760\u6027\u9ad8\uff0c\u5e76\u4e14\u975e\u5e38\u9002\u5408\u6279\u91cf\u5316\u751f\u4ea7\u3001\u6613\u4e8e\u96c6\u6210\u548c\u5b9e\u73b0\u667a\u80fd\u5316\u3002\u5728\u5fae\u7c73\u91cf\u7ea7\u7684\u7279\u5f81\u5c3a\u5bf8\u4e0b\uff0cMEMS\u4f20\u611f\u5668\u80fd\u591f\u5b8c\u6210\u4f20\u7edf\u673a\u68b0\u4f20\u611f\u5668\u65e0\u6cd5\u5b9e\u73b0\u7684\u529f\u80fd\u3002\u56e0\u6b64\uff0cMEMS\u4f20\u611f\u5668\u6b63\u5728\u9010\u6b65\u53d6\u4ee3\u4f20\u7edf\u673a\u68b0\u4f20\u611f\u5668\u7684\u4e3b\u5bfc\u5730\u4f4d\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u6d88\u8d39\u7535\u5b50\u4ea7\u54c1\u3001\u6c7d\u8f66\u5de5\u4e1a\u3001\u822a\u7a7a\u822a\u5929\u3001\u673a\u68b0\u3001\u5316\u5de5\u53ca\u533b\u836f\u7b49\u591a\u4e2a\u9886\u57df\u3002<\/p>\n\n\n\n
\u4e00\u3001MEMS\u4f20\u611f\u5668\u7684\u5e7f\u6cdb\u5e94\u7528\u9886\u57df<\/p>\n\n\n\n
MEMS\u4f20\u611f\u5668\u4ee5\u5176\u591a\u6837\u5316\u7684\u79cd\u7c7b\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7269\u7406\u3001\u5316\u5b66\u3001\u751f\u7269\u7b49\u9886\u57df\u7684\u4fe1\u53f7\u63a2\u6d4b\u3002\u5e38\u89c1\u7684MEMS\u4f20\u611f\u5668\u5305\u62ec\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u3001\u60ef\u6027\u4f20\u611f\u5668\u3001\u538b\u529b\u4f20\u611f\u5668\u3001MEMS\u9640\u87ba\u4eea\u4ee5\u53caMEMS\u9ea6\u514b\u98ce\u7b49\u3002\u76ee\u524d\uff0cMEMS\u4f20\u611f\u5668\u5728\u591a\u4e2a\u9886\u57df\u4e2d\u5360\u636e\u91cd\u8981\u5730\u4f4d\uff0c\u5176\u4e2d\u6d88\u8d39\u7535\u5b50\u9886\u57df\u5360\u6bd4\u6700\u9ad8\uff0c\u8fbe\u523041.8%\uff0c\u5176\u6b21\u662f\u533b\u7597\u9886\u57df\uff0c\u5360\u6bd428.1%\uff0c\u6c7d\u8f66\u7535\u5b50\u9886\u57df\u5360\u6bd416.7%\uff0c\u5de5\u4e1a\u9886\u57df\u5360\u6bd49.1%\u3002<\/p>\n\n\n\n
MEMS\u538b\u529b\u4f20\u611f\u5668\u662f\u5e94\u7528\u6700\u4e3a\u5e7f\u6cdb\u7684MEMS\u4f20\u611f\u5668\u4e4b\u4e00\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u667a\u80fd\u624b\u673a\u3001\u822a\u7a7a\u822a\u5929\u3001\u6c7d\u8f66\u3001\u751f\u7269\u533b\u836f\u4ee5\u53ca\u5de5\u827a\u63a7\u5236\u7b49\u9886\u57df\u3002\u6839\u636e\u538b\u529b\u63a2\u6d4b\u65b9\u5f0f\u7684\u4e0d\u540c\uff0cMEMS\u538b\u529b\u4f20\u611f\u5668\u53ef\u5206\u4e3a\u538b\u963b\u5f0f\u3001\u7535\u5bb9\u5f0f\u3001\u8c10\u632f\u4f20\u611f\u7b49\u7c7b\u578b\uff0c\u5176\u4e2d\u538b\u963b\u5f0f\u548c\u7535\u5bb9\u5f0f\u6700\u4e3a\u5e38\u7528\uff0c\u8fd9\u4e24\u79cd\u4f20\u611f\u5668\u7684\u6280\u672f\u4e5f\u5728\u4e0d\u65ad\u8fed\u4ee3\u66f4\u65b0\u3002<\/p>\n\n\n\n
\u4e3a\u4e86\u89e3\u51b3\u5fae\u538bMEMS\u4f20\u611f\u5668\u4e2d\u6d4b\u91cf\u654f\u611f\u6027\u4e0e\u7ebf\u6027\u5ea6\u4e4b\u95f4\u7684\u77db\u76fe\uff0c\u63d0\u9ad8\u5fae\u538b\u4f20\u611f\u5668\u7684\u6d4b\u91cf\u7cbe\u5ea6\uff0c\u4e00\u79cd\u65b0\u578b\u7684FBBM\u7ed3\u6784\u88ab\u5f00\u53d1\u51fa\u6765\u3002\u8be5\u7ed3\u6784\u5305\u542b\u56db\u4e2a\u77ed\u6881\u548c\u4e00\u4e2a\u4f4d\u4e8e\u4e2d\u5fc3\u7684\u65b9\u5f62\u51f8\u5757\uff0c\u901a\u8fc7\u51cf\u5c11\u4f20\u611f\u819c\u7684\u7ed3\u6784\u504f\u8f6c\u7a0b\u5ea6\uff0c\u6709\u6548\u964d\u4f4e\u4e86\u538b\u529b\u7684\u975e\u7ebf\u6027\uff0c\u5e76\u63d0\u9ad8\u4e86\u538b\u963b\u7075\u654f\u5ea6\uff0c\u4ece\u800c\u663e\u8457\u63d0\u5347\u4e86\u5fae\u538bMEMS\u4f20\u611f\u5668\u7684\u7cbe\u5ea6\u3002<\/p>\n\n\n\n
\u4e8c\u3001\u4e0d\u540cMEMS\u4f20\u611f\u5668\u7684\u7279\u6027\u5bf9\u6bd4<\/p>\n\n\n\n
MEMS\u4f20\u611f\u5668\u7684\u79cd\u7c7b\u7e41\u591a\uff0c\u6bcf\u79cd\u4f20\u611f\u5668\u56e0\u5176\u6d4b\u91cf\u5916\u90e8\u4fe1\u53f7\u7684\u7279\u6027\u4e0d\u540c\uff0c\u6280\u672f\u5b9e\u73b0\u4e0a\u5b58\u5728\u663e\u8457\u5dee\u5f02\u3002MEMS\u60ef\u6027\u4f20\u611f\u5668\u4e3b\u8981\u7528\u4e8e\u68c0\u6d4b\u7269\u4f53\u7684\u8fd0\u52a8\u72b6\u6001\uff0c\u901a\u5e38\u9700\u8981\u56fa\u5b9a\u5728\u8f7d\u4f53\u4e0a\u4ee5\u76d1\u6d4b\u5176\u8fd0\u52a8\uff0c\u56e0\u6b64\u591a\u91c7\u7528\u5bc6\u5c01\u5f0f\u5c01\u88c5\u3002\u76f8\u6bd4\u4e4b\u4e0b\uff0c\u538b\u529b\u4f20\u611f\u5668\u3001\u5149\u5b66\u4f20\u611f\u5668\u548c\u58f0\u5b66\u4f20\u611f\u5668\u5219\u9700\u8981\u76f4\u63a5\u63a5\u89e6\u88ab\u6d4b\u91cf\u7684\u4ecb\u8d28\uff0c\u56e0\u6b64\u5b83\u4eec\u901a\u5e38\u91c7\u7528\u5f00\u653e\u5f0f\u5c01\u88c5\uff0c\u5e76\u4e14\u9700\u8981\u6839\u636e\u4f7f\u7528\u73af\u5883\u8bbe\u8ba1\u6709\u5229\u4e8e\u6355\u6349\u4fe1\u53f7\u7684\u654f\u611f\u5355\u5143\u8868\u9762\u7ed3\u6784\u3002<\/p>\n\n\n\n
MEMS\u60ef\u6027\u4f20\u611f\u5668\u5728\u5e94\u7528\u9886\u57df\u4e0a\u76f8\u5bf9\u5e7f\u6cdb\uff0c\u4e0d\u4ec5\u5728\u9ad8\u53ef\u9760\u6027\u9886\u57df\uff0c\u5982\u822a\u7a7a\u822a\u5929\uff0c\u800c\u4e14\u5728\u5de5\u4e1a\u548c\u6d88\u8d39\u7535\u5b50\u9886\u57df\u4e5f\u6709\u4e30\u5bcc\u7684\u5e94\u7528\u573a\u666f\u3002\u4e0d\u540c\u5e94\u7528\u573a\u666f\u5bf9\u4f20\u611f\u5668\u7684\u6027\u80fd\u3001\u6210\u672c\u3001\u529f\u8017\u548c\u4f53\u79ef\u6709\u7740\u4e0d\u540c\u7684\u8981\u6c42\u3002\u4e0e\u5728\u5de5\u4e1a\u548c\u6d88\u8d39\u9886\u57df\u5e7f\u6cdb\u4f7f\u7528\u7684\u58f0\u5b66\u4f20\u611f\u5668\u3001\u73af\u5883\u4f20\u611f\u5668\u7b49\u76f8\u6bd4\uff0c\u9ad8\u6027\u80fd\u7684MEMS\u60ef\u6027\u4f20\u611f\u5668\u66f4\u591a\u5730\u5e94\u7528\u4e8e\u9ad8\u53ef\u9760\u6027\u9886\u57df\uff0c\u8fd9\u4e9b\u9886\u57df\u5728\u590d\u6742\u73af\u5883\u4e0b\u5bf9\u4ea7\u54c1\u6027\u80fd\u8981\u6c42\u6781\u9ad8\uff0c\u56e0\u6b64\u5bf9\u4ea7\u54c1\u7684\u53ef\u9760\u6027\u63d0\u51fa\u4e86\u66f4\u4e3a\u4e25\u683c\u7684\u8981\u6c42\uff0c\u6280\u672f\u95e8\u69db\u76f8\u5bf9\u8f83\u9ad8\u3002<\/p>\n\n\n\n
\u4e09\u3001MEMS\u4f20\u611f\u5668\u53d1\u5c55\u9762\u4e34\u7684\u6311\u6218<\/p>\n\n\n\n
\u5c3d\u7ba1\u56fd\u5185MEMS\u6280\u672f\u7814\u7a76\u8d77\u6b65\u8f83\u665a\uff0c\u76f4\u523020\u4e16\u7eaa80\u5e74\u4ee3\u672b\u624d\u88ab\u5217\u4e3a\u56fd\u5bb6\u91cd\u70b9\u7814\u7a76\u9879\u76ee\uff0c\u4f46\u7ecf\u8fc7\u8fd1\u4e09\u5341\u5e74\u7684\u4e0d\u61c8\u52aa\u529b\uff0c\u56fd\u4ea7MEMS\u6280\u672f\u5df2\u53d6\u5f97\u663e\u8457\u8fdb\u5c55\uff0c\u5e76\u5728\u5e02\u573a\u5e94\u7528\u65b9\u9762\u79ef\u7d2f\u4e86\u5b9d\u8d35\u7684\u7ecf\u9a8c\u3002\u4ee5MEMS\u9ea6\u514b\u98ce\u5e02\u573a\u4e3a\u4f8b\uff0c\u5168\u7403\u56db\u5927\u4e3b\u5bfc\u4f01\u4e1a\u4e2d\uff0c\u6709\u4e24\u5bb6\u6765\u81ea\u4e2d\u56fd\u2014\u2014\u6b4c\u5c14\u80a1\u4efd\u548c\u745e\u58f0\u79d1\u6280\uff0c\u5b83\u4eec\u6b63\u79ef\u6781\u6311\u6218\u884c\u4e1a\u9886\u5bfc\u8005\u697c\u6c0f\u7535\u5b50\u7684\u5730\u4f4d\uff0c\u5c55\u73b0\u51fa\u5f3a\u52b2\u7684\u53d1\u5c55\u52bf\u5934\u3002<\/p>\n\n\n\n
\u968f\u7740\u6d88\u8d39\u7535\u5b50\u3001\u6c7d\u8f66\u7535\u5b50\u3001\u5de5\u4e1a\u3001\u533b\u7597\u7b49\u9886\u57df\u7684\u8fc5\u731b\u53d1\u5c55\uff0c\u5e02\u573a\u5bf9MEMS\u4ea7\u54c1\u7684\u9700\u6c42\u65e5\u76ca\u8feb\u5207\uff0cMEMS\u5e02\u573a\u72b9\u5982\u4e00\u7247\u5e72\u6db8\u7684\u6c60\u5858\uff0c\u4e9f\u5f85\u66f4\u591a\u6d3b\u6c34\u7684\u6ce8\u5165\u3002<\/p>\n\n\n\n
\u7136\u800c\uff0c\u5236\u9020MEMS\u5668\u4ef6\u4e0d\u4ec5\u9700\u8981\u6210\u719f\u4e14\u591a\u6837\u5316\u7684\u5de5\u827a\u6280\u672f\uff0c\u8fd8\u5fc5\u987b\u62e5\u6709\u5145\u8db3\u7684\u4ea7\u7ebf\u4ee5\u4fdd\u8bc1\u4ea7\u80fd\u3002\u76ee\u524d\uff0c\u56fd\u5185\u80fd\u591f\u63d0\u4f9b\u4e13\u4e1aMEMS\u4ee3\u5de5\u670d\u52a1\u7684\u4f01\u4e1a\u5305\u62ec\u4e2d\u82af\u56fd\u9645\u3001\u65e0\u9521\u534e\u6da6\u4e0a\u534e\u3001\u4e0a\u6d77\u5148\u8fdb\u7b49\uff0c\u5b83\u4eec\u80fd\u591f\u6ee1\u8db3\u4ee3\u5de5\u4ea7\u80fd\u548c\u826f\u7387\u7684\u8981\u6c42\u3002\u7136\u800c\uff0c\u5176\u4ed6\u5927\u591a\u6570\u56fd\u5185MEMS\u4ee3\u5de5\u4f01\u4e1a\u5c1a\u672a\u79ef\u7d2f\u8db3\u591f\u7684\u5de5\u827a\u6280\u672f\u50a8\u5907\u548c\u5927\u89c4\u6a21\u5e02\u573a\u9a8c\u8bc1\u53cd\u9988\u7684\u7ecf\u9a8c\uff0c\u52a0\u5de5\u5de5\u827a\u7684\u4e00\u81f4\u6027\u548c\u53ef\u91cd\u590d\u6027\u4e5f\u672a\u80fd\u6ee1\u8db3\u8bbe\u8ba1\u9700\u6c42\uff0c\u4ea7\u54c1\u7684\u826f\u7387\u548c\u53ef\u9760\u6027\u66f4\u662f\u96be\u4ee5\u8fbe\u5230\u89c4\u6a21\u5316\u751f\u4ea7\u7684\u6807\u51c6\u3002<\/p>\n\n\n\n
\u5728\u8fd9\u79cd\u80cc\u666f\u4e0b\uff0c\u8bbe\u8ba1\u516c\u53f8\u5f80\u5f80\u4e0d\u5f97\u4e0d\u9009\u62e9\u4e0e\u56fd\u5916\u6210\u719f\u7684\u4ee3\u5de5\u5382\u5408\u4f5c\uff0c\u4ee5\u786e\u4fdd\u4ea7\u54c1\u8d28\u91cf\u3002\u800c\u5728\u540e\u7aef\u7684\u5c01\u88c5\u6d4b\u8bd5\u73af\u8282\uff0c\u60c5\u51b5\u5219\u76f8\u5bf9\u4e50\u89c2\uff0c\u5357\u901a\u5bcc\u58eb\u901a\u3001\u6676\u65b9\u534a\u5bfc\u4f53\u3001\u534e\u5929\u79d1\u6280\u3001\u957f\u7535\u79d1\u6280\u3001\u901a\u5bcc\u5fae\u7535\u7b49\u4f01\u4e1a\u80fd\u591f\u6ee1\u8db3\u4ea7\u54c1\u8d28\u91cf\u548c\u6570\u91cf\u7684\u8981\u6c42\u3002<\/p>\n\n\n\n
\u56db\u3001MEMS\u4f20\u611f\u5668\u7684\u53d1\u5c55\u524d\u666f<\/p>\n\n\n\n
\u968f\u7740\u56fd\u4ea7MEMS\u4f20\u611f\u5668\u4ea7\u4e1a\u7684\u4e0d\u65ad\u6210\u719f\uff0cMEMS\u6280\u672f\u5c06\u4f20\u611f\u5668\u201c\u82af\u7247\u5316\u201d\u7684\u80fd\u529b\u5df2\u83b7\u5f97\u5e7f\u6cdb\u8ba4\u53ef\u3002\u5728\u63a2\u8ba8\u56fd\u4ea7\u4f20\u611f\u5668\u7684\u53d1\u5c55\u8d8b\u52bf\u65f6\uff0c\u9664\u4e86\u96c6\u6210\u5316\u3001\u5c0f\u578b\u5316\u548c\u667a\u80fd\u5316\u7b49\u4f20\u7edf\u65b9\u5411\uff0c\u201cMEMS\u5316\u201d\u4e5f\u6210\u4e3a\u4e86\u4e00\u4e2a\u65b0\u7684\u5173\u952e\u8bcd\u3002\u8bbe\u5907\u7684\u5c0f\u578b\u5316\u548c\u4f4e\u529f\u8017\u662f\u672a\u6765MEMS\u4f20\u611f\u5668\u884c\u4e1a\u7684\u91cd\u8981\u53d1\u5c55\u8d8b\u52bf\u4e4b\u4e00\u3002\u968f\u7740\u4eba\u5de5\u667a\u80fd\u548c\u7269\u8054\u7f51\u6280\u672f\u7684\u8fdb\u6b65\uff0cMEMS\u4f20\u611f\u5668\u7684\u5e94\u7528\u573a\u666f\u5c06\u53d8\u5f97\u66f4\u52a0\u591a\u5143\u5316\u3002<\/p>\n\n\n\n
MEMS\u4f20\u611f\u5668\u4f5c\u4e3a\u4eba\u5de5\u667a\u80fd\u7684\u91cd\u8981\u5e95\u5c42\u786c\u4ef6\u4e4b\u4e00\uff0c\u5176\u6536\u96c6\u7684\u6570\u636e\u7684\u4e30\u5bcc\u6027\u548c\u7cbe\u51c6\u6027\u76f4\u63a5\u5173\u7cfb\u5230\u4eba\u5de5\u667a\u80fd\u529f\u80fd\u7684\u5b8c\u5584\u7a0b\u5ea6\u3002\u672a\u6765\uff0c\u667a\u80fd\u5bb6\u5c45\u3001\u5de5\u4e1a\u4e92\u8054\u7f51\u3001\u8f66\u8054\u7f51\u3001\u667a\u80fd\u57ce\u5e02\u3001\u673a\u5668\u4eba\u7b49\u65b0\u5174\u4ea7\u4e1a\u9886\u57df\u5c06\u4e3aMEMS\u4f20\u611f\u5668\u884c\u4e1a\u5e26\u6765\u5de8\u5927\u7684\u5e02\u573a\u6f5c\u529b\u3002\u968f\u7740\u6280\u672f\u6c34\u5e73\u7684\u4e0d\u65ad\u63d0\u5347\uff0c\u5e02\u573a\u5bf9\u201c\u5c0f\u800c\u667a\u80fd\u201d\u7684\u4f20\u611f\u5668\u9700\u6c42\u65e5\u76ca\u589e\u957f\uff0c\u7279\u522b\u662f\u5728\u7269\u8054\u7f51\u7b49\u5e94\u7528\u7684\u63a8\u52a8\u4e0b\uff0cMEMS\u4f20\u611f\u5668\u7684\u5e94\u7528\u524d\u666f\u5c06\u66f4\u52a0\u5e7f\u9614\u3002<\/p>\n\n\n\n
<\/p>\n","protected":false},"excerpt":{"rendered":"
\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\uff0c\u8fd9\u4e00\u9ad8\u79d1\u6280\u88c5\u7f6e\u7684\u5c3a\u5bf8\u901a\u5e38\u5728\u51e0\u6beb\u7c73\u751a\u81f3\u66f4\u5c0f\uff0c\u5176\u5185\u90e8\u7ed3\u6784\u7cbe\u7ec6\u81f3\u5fae\u7c73\u751a\u81f3\u7eb3\u7c73\u91cf\u7ea7\u3002MEMS\u6280\u672f\u662f\u5728\u5fae\u7535\u5b50\u6280\u672f\uff08\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\uff09\u7684\u57fa\u7840\u4e0a\u53d1\u5c55\u8d77\u6765\u7684\uff0c\u5b83\u878d\u5408\u4e86\u5149\u523b\u3001\u8150\u8680\u3001\u8584\u819c\u3001LIGA\u3001<\/p>\n","protected":false},"author":1,"featured_media":355,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[11],"tags":[],"class_list":["post-354","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry"],"_links":{"self":[{"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/posts\/354","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/comments?post=354"}],"version-history":[{"count":2,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/posts\/354\/revisions"}],"predecessor-version":[{"id":357,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/posts\/354\/revisions\/357"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/media\/355"}],"wp:attachment":[{"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/media?parent=354"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/categories?post=354"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.jthmems.com\/wp-json\/wp\/v2\/tags?post=354"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}